Ion beam analysis techniques are often used for the determination of elemental concentration depth profiles of various samples. The final results rely on simulations, fits and calculations, made by dedicated codes written for specific techniques. Amongst the different softwares available, SIMNRA is one of the more powerful codes to simulate experimental spectra obtained by Rutherford Backscattering Spectroscopy (RBS), Elastic Recoil Detection Analysis (ERDA), Nuclear Reaction Analysis (NRA) or Medium Energy Ion Scattering (MEIS). The best agreement between the theoretical and experimental curves is obtained by adjusting the composition of the SIMNRA target file. When the structure of the sample under analysis becomes more complicated, the target file has to be manually sliced into several layers, which can rapidly become tedious.
SIMTarget code has then been designed in order to easily generate all SIMNRA target files regardless to the sample complexity. It is able to model the diffusion between two layers, as well as the presence of dopant into the sample. A graphic display shows the depth distribution of each element that is very useful to adjust the target composition during simulations.
SIMTarget code has been developed by J.L. Colaux, member of the Laboratory of Analysis by Nuclear Reactions (LARN) from the Physics Department (PMR) of the University of Namur (UNamur).